Analytical, Diagnostic and Therapeutic Techniques, and Equipment

Micro-Electrical-Mechanical Systems

A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.

National Library of MedicineMedical Subject Headings2026

Structured Summary

Abstract

A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.

MeSH Record

Classification

Broader headings

Narrower headings

Related Concepts

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MeSH Record

Synonyms

11 entry terms
  • MEMS
  • Micro-Electro-Mechanical Systems
  • Micro Electrical Mechanical Systems
  • Micro Electro Mechanical Systems
  • Micro-Electrical-Mechanical System
  • Micro-Electro-Mechanical System
  • System, Micro-Electrical-Mechanical
  • System, Micro-Electro-Mechanical
  • Systems, Micro-Electrical-Mechanical
  • Systems, Micro-Electro-Mechanical
  • BioMEMS

MeSH Record

Aspects Covered

4 allowable subheadings

Indexed with the subheadings instrumentation, methods, standards, statistics & numerical data.

MeSH Record

History Note

2009

MeSH Hierarchy

Tree Numbers

  1. E07w.305w.343w
  2. J01.637.509w

MeSH Record

NLM Classification

QT 36.5

AMA Style

References

  1. National Library of Medicine. Micro-Electrical-Mechanical Systems. Medical Subject Headings (MeSH). 2026. Unique ID D055617. http://id.nlm.nih.gov/mesh/2026/D055617
  2. Micro-Electrical-Mechanical Systems. In: Wikipedia. https://en.wikipedia.org/wiki/MEMS
  3. Micro-Electrical-Mechanical Systems. In: Wikidata. https://www.wikidata.org/wiki/Q175561